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ENGINEERING BULLETIN

Publisher: All-Russian public organization "Academy of Engineering Sciences named after A.M. Prokhorov".

77-48211/368736 Research of double exposure mask technology’s critical parameters

Engineering Bulletin # 05, May 2012
Article file: Аверьянихин_P.pdf (151.91Kb)
authors: A.E. Averyanikhin, D.V. Tihomirov

References

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2.   Moore G. Cramming More Components Onto Integrated Circuits. Electronics, 1965, vol. 38, no. 8, pp. 114- 117.

3.   Suzuki K., Smith B.W. Microlithography: Science and technology. CRC Press, 2007, 800 p.

4.   Zinchenko L. A., Rezchikova E.V., Aver'ianikhin A.E. Algoritmy transformatsii topologii submikronnykh SBIS [Algorithms of Topology Transformation of Submicron Very Large-Scale Integration Circuits]. Vestnik MGTU im. N.E. Baumana. Ser. Priborostroenie [Herald of the Bauman MSTU. Ser. Instrumentation], 2011, no. 1, pp. 76-78 .

5.   Kureichik V.M., Zinchenko L.A., Tarasenko M.V. Primenenie simvol'nykh informatsionnykh tekhnologii v zadachakh modelirovaniia elektronnykh ustroistv[The use of symbolic information technologies in problems of modeling of electronic devices]. Programmnye produkty i sistemy, 2001, no. 2, pp. 13-17.

6.   Geller D., Stahl S. The chromatic number and other parameters of the lexicographic product. J. Combin. Theory Ser. B 19, August 1975, vol. 19, no. 1, pp. 87–95. doi:10.1016/0095-8956(75)90076-3

7.   Vlasov A.I., Nazarov A.V. Osnovy modelirovaniia mikro- i nanosistem [The bases of modelling of micro - and nanosystems]. Moscow, Bauman MSTU Publ., 2011. 144 p. (Biblioteka "Nanoinzheneriia": v 17 kn. Kn. 14 [Library "Nanoengineering". In 17 books. Book 14]).

8.   Vlasov A.I., Zinchenko L.A., Makarchuk V.V., Rodionov I.A. Avtomatizirovannoe proektirovanie nanosistem [Computer-aided design of nanosystems]. Moscow, Bauman MSTU Publ., 2011.  184 p. (Biblioteka "Nanoinzheneriia": v 17 kn. Kn. 13 [Library Nanoengineering". In 17 books. Book 13]).

9.   Makarchuk V.V., Rodionov I.A., Tsvetkov Iu.B. Metody litografii v nanoinzhenerii [Methods of lithography in nanoengineering]. Moscow, Bauman MSTU Publ., 2011.  175 p. (Biblioteka "Nanoinzheneriia": v 17 kn. Kn. 9 [Library Nanoengineering". In 17 books. Book 9]).

10. Zinchenko L.A. SAPR Nanosistem [CAD Nanosystems]. Moscow, Bauman MSTU Publ., 2011.  224 p. (Biblioteka "Nanoinzheneriia": v 17 kn. Kn. 17 [Library Nanoengineering". In 17 books. Book 17]).


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